摘要
采用多弧离子镀法在柔性聚酰亚胺(PI)基底上制备了Ti/TiO2复合多层薄膜,通过控制基底材料的粗糙度使制备出的薄膜在可见波段具有非镜面反射效果。通过分别控制薄膜的内层和外层膜的厚度使其在8～14μm波段具有连续可调的红外发射率。采用扫描电镜、X射线衍射、紫外-可见-近红外光光度计等测试手段对薄膜样品进行了表征,并测试了样品的红外发射率。实验结果表明,采用多弧离子镀法成功的在PI基底上制备了结合力较好、具有多种颜色、红外发射率和方块电阻连续可调的薄膜。研究发现,在外层TiO2膜工艺不变的情况下,随着内层Ti膜厚度增加,红外发射率和方块电阻连续减小;在内层Ti膜工艺不变的情况下,随着外层TiO2膜厚度增加,红外发射率和方块电阻连续增大。
The multi-arc plasma deposition method is used to prepare films on flexible polyimide （PI） substrates. Through the control of the roughness of the substrate material, the prepared films have non-specular reflection effect in visible band with camouflage characteristics and have low infrared emissivity continuously adjusted in 8- 14 μm band. The prepared flexible substrate films were analyzed and characterized by scanning electron microscopy, X-ray diffraction and the UV-visible spectrum, and the infrared emissivity was also tested. The results show that, we successfully obtained continuously adjusted low infrared emissivity films with good binding force and a variety of colors on PI substrates through multi-arc plasma deposition method. The results show that the IR emissivity and the sheet resistance continuously decreased as the thickness of the inner layer Ti increased and they continuously increased as the thickness of the outer layer TiO2 increased.
出处
《红外技术》
CSCD
北大核心
2008年第11期677-680,共4页
Infrared Technology
