摘要
本文介绍了一种基于光纤光谱仪的宽光谱综合监控系统,该系统在光学镀膜过程中,采用实时宽光谱、评价函数、单波长极值、色度分析等多种方法综合监控光学薄膜膜厚。详细阐述了该系统的工作原理、硬件系统和软件系统,并进行了一系列镀膜实验。实验结果表明该系统能够实现光学镀膜在线实时监控,且非常适合国产镀膜设备的升级改造。
The fiber optic spectrometer was introduced into a comprehensive monitoring system with its wideband spectrum for the deposition process of optical thin films, by which the film thickness can be monitored comprehensively by such methods as the real-time wide spectrum range, evaluation function, single-wavelength extremum and colorimetric analysis. The working principle, hardware and software systems of the system are elaborated in detail. With a series of tests done for the thin film preparation under the monitoring system, the results showed that the system can play an on-line and real-time role in monitoring the optical thin film preparation and fits well the upgrading of domestic coating systems.
出处
《真空》
CAS
北大核心
2008年第6期57-59,共3页
Vacuum
关键词
光纤光谱仪
光学薄膜
宽光谱
膜厚监控
综合监控
LabVIEW
fiber optic spectrometer
optical thin film
wideband spectrum
film thickness monitoring
comprehensive monitoring
LabVIEW
