摘要
笔者之一曾在1982年发表《SiCl4氢化反应的探索》的热力学分析的文章,结合近期国内多晶硅产业蓬勃发展的新形势和对西门子法工艺主要副产物SiCl4有效利用的迫切需要,本文试图探索四氯化硅在西门子法多晶硅生产流程中循环利用的可能途径。
One of the authors published an article ＂Study on the Hydrogenation Reaction of SiCl4＂ from the thermodynamic viewpoint in 1982. With the recent rapid development of domestic polysilicon industry, a critical problem is put forward, namely, how to make use of the main by-product（silicon tetrachloride） in the production of polysilicon by Siemens process. The possible methods including hydrogenation of SiCl4 and some new processes for the low cost polysilicon are discussed.
出处
《东方电气评论》
2008年第4期70-72,共3页
Dongfang Electric Review
关键词
四氯化硅
循环利用
polysilieou
Siemens process
SiCl4
