摘要
采用喷雾热解法,在玻璃基板上制备了辐射率较低的SnO2薄膜。利用紫外可见光分光光度计、XRD等手段,研究了沉积温度、液流量对薄膜结构及光电性能的影响。结果表明,沉积温度为520℃、液流量为1.30mL/s时,薄膜具有较佳的电学、光学性能,透过率为80%,电阻率为7×10-4Ω.cm。
Low emission SnO2 films were deposited on glass plates by spray pyrolysis. The effects of the substrate temperature and flow on the structure and electric-optic characteristics of the films were investigated by UV-Vis spectral photometer and XRD. The results showed that the films exhibited the best electric-optic properties, average transmittance of 80% and the resistivity of 7×10^-4Ω·cm at the substrate temperature of 520 ℃ and the flow of 1.30mL/s.
出处
《洛阳理工学院学报(自然科学版)》
2008年第2期5-7,共3页
Journal of Luoyang Institute of Science and Technology:Natural Science Edition
基金
国家自然科学基金项目(90401009)
河南省安全科技攻关项目(082102290003)