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喷雾热解法制备SnO_2薄膜的结构及性能研究 被引量:2

Research on Structure and Properties of SnO_2 Films by Spray Pyrolysis
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摘要 采用喷雾热解法,在玻璃基板上制备了辐射率较低的SnO2薄膜。利用紫外可见光分光光度计、XRD等手段,研究了沉积温度、液流量对薄膜结构及光电性能的影响。结果表明,沉积温度为520℃、液流量为1.30mL/s时,薄膜具有较佳的电学、光学性能,透过率为80%,电阻率为7×10-4Ω.cm。 Low emission SnO2 films were deposited on glass plates by spray pyrolysis. The effects of the substrate temperature and flow on the structure and electric-optic characteristics of the films were investigated by UV-Vis spectral photometer and XRD. The results showed that the films exhibited the best electric-optic properties, average transmittance of 80% and the resistivity of 7×10^-4Ω·cm at the substrate temperature of 520 ℃ and the flow of 1.30mL/s.
出处 《洛阳理工学院学报(自然科学版)》 2008年第2期5-7,共3页 Journal of Luoyang Institute of Science and Technology:Natural Science Edition
基金 国家自然科学基金项目(90401009) 河南省安全科技攻关项目(082102290003)
关键词 喷雾热解法 低辐射玻璃 SNO2薄膜 Spray pyrolysis Low-E glass SiO2 thin films
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