摘要
研究加工误差达到纳米级的试件表面力学性能及其评价。首先,加工出表面粗糙度达到纳米级的玻璃和陶瓷两个试件,采用X射线衍射测试原理测试表层残余应力。其次,采用原理为Oliver-Pharr的纳米压痕法对试件进行破坏性实验,对比研究各参数测试结果值。结果表明,残余应力和硬度具有一定联系,这对表面完整性评价、改善加工工艺有一定指导意义。
The mechanical properties of super smooth surface had been researched. First, glass and ceramic workpieces whose surface roughness had to been expressed by nanometer, is manufactured. The residual stress of workpieces is tested by using X-ray diffraction method. Then, the nano-hardness is tested by using Oliver-Pharr method. Contrast the testing result of different parameters. The discussion shows that residual stress and nano-hardness has some relationship. This result is significant to express surface integrity and direct to the surface manufacturing.
出处
《宇航计测技术》
CSCD
2008年第6期23-26,共4页
Journal of Astronautic Metrology and Measurement
基金
北京市自然科学基金资助项目(No.3052012)
关键词
表面
力学性质
残余应力
硬度
Surface Mechanical property Residual stress Hardness
