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Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane 被引量:1

Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane
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摘要 A mass of nanoparticles/nanorods were formed on a simultaneously deposited gran- ular film by plasma enhanced chemical vapor deposition (PECVD) of perfluorohexane at atmo- spheric pressure without any catalysts or templates. Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize the morphology and the chem- ical compositions of nanoparticles. The average size of particles is about 100 nm and the length of synthesized nanorods is between 1 μm and 2.5/tm. The analyses of transmission electron microscopy (TEM), high-resolution transmission electron microscopy (HRTEM), selected area electron diffraction(SAED) and X-ray diffraction (XRD) reveals that the nanoparticles and nanorods are crystalline. A mass of nanoparticles/nanorods were formed on a simultaneously deposited gran- ular film by plasma enhanced chemical vapor deposition (PECVD) of perfluorohexane at atmo- spheric pressure without any catalysts or templates. Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize the morphology and the chem- ical compositions of nanoparticles. The average size of particles is about 100 nm and the length of synthesized nanorods is between 1 μm and 2.5/tm. The analyses of transmission electron microscopy (TEM), high-resolution transmission electron microscopy (HRTEM), selected area electron diffraction(SAED) and X-ray diffraction (XRD) reveals that the nanoparticles and nanorods are crystalline.
机构地区 College of Science
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第6期706-709,共4页 等离子体科学和技术(英文版)
基金 National Natural Science Foundation of China(No.50473003)
关键词 fluorocarbon nanoparticles/nanorods structure characterization plasma chemical vapor deposition atmospheric pressure fluorocarbon nanoparticles/nanorods, structure characterization, plasma chemical vapor deposition, atmospheric pressure
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参考文献19

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