摘要
介绍了PSD(Position Sensitive Detector)传感器的结构及工作原理,设计了一种基于PSD的非接触精密位移测量系统。系统包括PSD传感器、控制系统和上位机3部分。对控制系统的硬件电路进行了详细介绍,控制系统以STC89C52RC单片机和具有24位转换精度的AD7714为核心。单片机通过AD7714采集PSD传感器的输出信号,再对采集到的位移信号分析处理后将数据打包通过RS-485接口传给上位机,位移值在上位机界面上显示出来,实现了对系统的远程控制和实时测量。系统的量程为-10^+10 mm,测量分辨率达到了1μm,测量精度较高。
The structure and principle of PSD （position sensitive detector） sensor were presented. A non-contact accurate displacement measure system based on PSD was developed. The system consisted of sensor, control system and up-computer. The circuit of control system was formulated detailedly, the STC89C52RC and AD7714 with 24 bits no missing codes were the core of the control system. Single chip microprocessor collected the output signal of PSD sensor by AD7714, and processed the collected data. Then the processed data were packaged and transmitted to up-computer by RS-485 bus, the displacement quantity was displayed on the computer,the real-time measure and remote control were realized. The resolution of the system is get up to 1μm,the measuring range is from -10mm to ＋10mm,the system has higher survey accuracy.
出处
《仪表技术与传感器》
CSCD
北大核心
2008年第12期1-3,共3页
Instrument Technique and Sensor
