摘要
纳米晶硅薄膜是集晶体硅材料和氢化非晶硅薄膜优点于一体,可望广泛应用于薄膜太阳能电池、光存储器、发光二极管和薄膜晶体管等光电器件的一种新型功能材料.本文综述低温制备优质纳米晶硅薄膜技术的研究进展及其在薄膜硅太阳能电池上的应用.
Nanocrystalline silicon film is a new functional material, which has both the advantages of c-Si and a-Si ： H films and widely applied in optoelectronic devices such as thin film solar cells, optical memories, light emitting diodes and thin film transistors. In this paper, the recent research progress of the preparation techniques of the high quality nanocrystlline film at low temperature and its application to solar cell is summarized.
出处
《材料研究与应用》
CAS
2008年第4期450-454,共5页
Materials Research and Application
基金
韩山师范学院青年科研基金资助项目(0503)
关键词
纳米晶硅薄膜
太阳能电池
低温制备
进展
nanocrystalline silicon thin films
solar cells
low-temperature preparation
progress
