摘要
设计制作了同一晶片上的集成三电极的谐振器。研究了这种谐振器的力敏特性与加力方位、电极材料的关系。并对电极材料分别为Au、Al的谐振器进行了比较实验。结果表明,谐振器的力敏特性与加力方位密切相关,加力方位与x轴夹角ψ为0°时,力敏系数最大;电极材料通过对石英晶体谐振器有效机电耦合系数的影响,进而影响谐振器的力–频特性。集成式谐振器在相同加力方位时,镀Au电极比Al电极的力敏系数最大可高出189.8Hz/N。
The integrated three-electrode resonator was designed and fabricated on the same wafer. The relation of the resonators＇ the force sensitive characteristic with adding force azimuth was studied and comparing experiments of the resonators with Au or Al electodes were carried on. The results show that the resonators＇ force sensitive characteristic is closely related to adding force azimuth. When ψ is 0°, the force sensitive coefficient is maximum; and the electrode materials affect the resonators＇ force frequency characteristic through to effect its effective electro-mechanical coupling coefficient. Force-sensitive coefficient of integrated resonator with Au electrode is 189.8 Hz/N higher than that of Al electrode.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2009年第2期38-41,共4页
Electronic Components And Materials
基金
北京市自然科学基金资助项目(No.4082011)
北京(传感器)重点实验室开放课题基金资助项目(No.KM200710772022)
关键词
集成式谐振器
力敏特性
电极材料
integrated resonator
force sensitive characteristic
electrode material
