摘要
两维高速压电倾斜反射镜是自适应光学系统和提高跟瞄系统精度的关键器件。本文介绍了我们研制的各种倾斜镜的性能，对于大口径大角位移的倾斜镜，谐振频率将受到口径和角位移的限制，本文分析了这些限制，并提出提高谐振频率的措施。
The two-dimensional piezoelectric fast steering mirror(FSM) is the key componentfor Adaptive Optical system and precise optical system. In this paper, the performancesof some kinds of FSM made by ourselves are introduced. Resonance frequency of FSMwith large diameter and angle stroke will be confined by its diameter and angle stroke.These limited factors are analyzed in our works and some methods for improving resonancefrequency are put forward.
出处
《量子电子学报》
CAS
CSCD
1998年第2期206-211,217,共7页
Chinese Journal of Quantum Electronics
基金
国家高技术发展计划激光领域资助
