摘要
为了研究大步距高精度精密位移机构,利用超磁致伸缩材料和压电陶瓷材料在驱动原理和使用方法上的相似性,提出一种超磁致伸缩材料与压电叠堆组成的混合驱动精密位移机构,介绍了机构运动原理及控制方式,制作了试验样机.测试表明,所研制的混合精密位移机构能实现双向可控运动,单步前进最大位移可达20μm,调节驱动电压可控制单步位移量,能满足大步距、高精度的驱动要求.
In order to develop a kind of great step-space and high precision actuate-mohon mechanism, a new type of actuate-motlon mechanism constructed with giant magnetostrictive material and piezoelectric stack has been investigated, which are similar each other in drive principle and usage. Based on the moving process, the principle and control mode of the mechanism are introduced. Results of the experiment show that, the actuate-motion mechanism can move forward and backward along the rail under the control of the given signal, the maximum displacement of single forward step can be up to 20μm. The actuate position requirement can be throughment controlling the step displacement with the adjustment of driving voltage.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2009年第1期149-151,共3页
Journal of Harbin Institute of Technology
基金
吉林省自然科学基金资助项目(20040577)
关键词
超磁致伸缩材料
压电陶瓷
精密驱动
柔性铰链
giant magnetostrictive material
piezoelectric ceramic
actuate motion
flexible joint
