摘要
采用溶胶-凝胶旋涂法在Si(100)衬底上制备Na掺杂ZnO薄膜,退火温度分别为873,973,1073K。研究了退火温度对Na掺杂ZnO薄膜形貌、微观结构和光学性能的影响。室温光致发光谱显示,在973K下退火的样品具有中心位于361nm处尖锐而强的紫外发光峰,在388,425nm处各有一个比较弱的紫色和蓝色发光峰,在可见光范围内发光峰的强度很弱。
The sol-gel technique offers the greatest possibility of preparing thin films of large and small areas by controllability of composition and relatively simple facilities. In the sol-gel process, thin ZnO films are obtained through post-depositional crystallisation. As-deposited films must be transferred into a crystalline state from an amorphous state by post-annealing. This paper addresses the effect of annealing temperature on the microstructure and the photoluminescence of ZnO thin films.
2-methoxy ethanol and monoethanolamine were used as the solvent and stabilising agent, respectively. The dopant source for natrium was natrium nitrate. Zinc acetate dihydrate and the source of dopant （ 10% ） were first dissolved in a mixture of 2-methoxy ethanol and monoethanolamine at room temperature. The concentration of zinc acetate was 0.8 mol/L and the molar ratio of monoethanolamine to zinc acetate was kept at 1 ： 1. The solution was stirred for 2 hours at 343 - 353 K to yield a clear, homogeneous and transparent solution using a magnetic stirrer, which served as the coating solution. The coating was made during the two days when the solution was prepared. The substrates were spun at 3 000 r/min for 30 s, while coating. After spin coating the substrates were kept at 623 K for 10 min. To evaporate the solvent and eliminate the organic component in the film. This procedure was repeated ten times. The films were then annealed at 873,973 and 1 073 K respectively for 90 min.
High quality c-axis Na-doped ZnO films on Si （100） substrates were grown by the PL spectra were investigated at room temperature. Photoluminescence spectrum shows exciton emission peak at 361 nm, a weak violet exciton emission peak at 388 nm and a range of 425 - 435 nm. sol-gel process. The a strong ultra violet blue emissions in the
出处
《发光学报》
EI
CAS
CSCD
北大核心
2009年第1期81-85,共5页
Chinese Journal of Luminescence
基金
国家自然科学基金(50602037)
山东省优秀中青年科学家奖励基金(2005BS04001)资助项目
