摘要
该文介绍一种适用于大中型精密钢球表面粗糙度测量的电动轮廓仪的工作原理和设计方案。仪器根据M制轮廓针描法原理进行设计。由于采用了特殊结构的高灵敏度压电传感器和极低自振量的旋转式电动驱动机构,使仪器的"虚假信号"降低到了(0.002～0.003)μm(Ra)、示值变动性达到了(0.001～0.002)μm(Ra)水平。
This paper will introduce the principle and design of stylus instruments for the measurement of surface roughness by the profile methed used for the measurement precision bearing balls. This instrument uses the design principle of profile contact （stylus） methed by the system M , As make use of special high sensitivity piezoelectricity transducer and tiny vibration driver, the residual profile of stylus instrument has achieved 0.002-0.003μm （Ra）, the variation of indication has achieved 0.001-0.002μm （Ra）
出处
《上海计量测试》
2009年第1期2-4,共3页
Shanghai Measurement and Testing
关键词
表面粗糙度
粗糙度测量仪器
精密钢球
profile meter by the system M, surface roughness, contact （stylus） instrument for measurement surface roughness, pricision bearing ball
