摘要
NO2是一种强毒性气体,本文利用了溶胶—凝胶法在硅片及陶瓷管上制备TiO2纳米薄膜,并探讨了在制备过程中不同的因素对薄膜成膜质量的影响。并用马弗炉对硅片及陶瓷管上制备的TiO2纳米薄膜进行不同温度的退火处理。对其分别进行XRD的分析,和原子力显微镜分析。利用气敏测试系统对不同的退火温度下的气敏元件进行测试。研制出工作温度低,气敏特性强,响应恢复特性好的基于TiO2的NO2气敏传感器。
NO2 was a strong toxic gas. TiO2 nanometer thin films ale prepared on the Si chip and the ceramic pipe by sol - gel method for detecting NO2 in this paper. The influences of different factors to the membrane qualities of thin films in the preparation processes are discussed. And ,annealing treatments to the TiO2 nanometer thin films are completed by the muffle furnaces in different temperature conditions. The XRD and AFM analysis are done separately to therm. The performances of gas sensor with different thin films annealed in different temperatures are tested using the gas test system. A new NO2 gas sensor based on TiO2 is developed with low operating temperature, high sensitivity, fast respond and restore time （response time =2s, restore time =6s）.
出处
《传感器世界》
2009年第2期15-19,共5页
Sensor World
