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Relationship between Power Density Distribution and Homogenization of Diamond Film in the Multifilament CVD System

Relationship between Power Density Distribution and Homogenization of Diamond Film in the Multifilament CVD System
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摘要 Periodical macro stripes have been found on diamond film prepared on a Si substrate by the multifilament chemical vapor deposition (CVD) method when the filament substrate distance is less than 2 mm. The properties of the stripe on the film were characterized qualitatively by a scanning electron microscope (SEM) and Raman scattering spectrometer. The measurement results show that this stripe corresponds to the different kinds of the microstructure and thickness of the film. Through calculation of the thermal radiation energy density distribution on the surface of substrate, this phenomenon can be explained successfully. Periodical macro stripes have been found on diamond film prepared on a Si substrate by the multifilament chemical vapor deposition (CVD) method when the filament substrate distance is less than 2 mm. The properties of the stripe on the film were characterized qualitatively by a scanning electron microscope (SEM) and Raman scattering spectrometer. The measurement results show that this stripe corresponds to the different kinds of the microstructure and thickness of the film. Through calculation of the thermal radiation energy density distribution on the surface of substrate, this phenomenon can be explained successfully.
出处 《Advances in Manufacturing》 SCIE CAS 1998年第4期79-83,共5页 先进制造进展(英文版)
关键词 diamond film power density distribution diamond film, power density distribution
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