摘要
介绍一种以多晶硅薄膜为敏感材料的压力传感器。该传感器利用了双岛结构膜片的应力集中效应，灵敏度得到提高，且具有良好的线性度和过载能力。
Abstract A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material. The sensor achieved dramatically greater sensitivity due to stress concentration effects. It has good linearity and has extensive application prospects on the development of high temperature pressure sensor.
出处
《传感器技术》
CSCD
1998年第3期32-34,共3页
Journal of Transducer Technology
