摘要
在观察与分析压入过程中CVD金刚石膜开裂方式的基础上，初步探讨了用压痕试验法评定CVD金刚石膜粘附性能的可行性．采用反映膜／基粘附性能的临界开裂或剥落载荷Per和抗裂性参数dP／dX两指标评定了硬质合金基体表面经不同预处理方法和沉积工艺参数合成的金刚石膜的粘附性能；研究了粘附性能指标与沉积工艺参数（如甲烷浓度、沉积气压、沉积功率）之间的关系．适当的表面预处理、适中的甲烷浓度、较低的沉积气压、较高的沉积功率均有利于改善金刚石膜的粘附性能．
The feasibility of using the indentation test method to evaluate the adhesion property of chemical vapor deposited diamond film was investigated initially on the basis of observations and analyses of the crackillg or delamination ways of diamond films under indentation. Tile critical load for lateral crack initiation or peeling-off (Pc,) and the cracking resistance (dP/dX), two useful adhesion parameters, were used to characterize the adhesion properties of diamond films synthesized by various pretreatment methods and deposition process parameters. The relationships between adhesion properties and methane concentrations, deposition pressllres, deposition powers and residual stresses were studied. Adhesion properties of diamond films call be improved using proper pretreatment of substrate surface, suitable methane concentration, lower deposition pressure and higher deposition power.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第1期83-90,共8页
Journal of Inorganic Materials
基金
广东省科委项目!950263
省高教厅项目!960004
关键词
压痕试验法
CVD
粘附性能
金刚石薄膜
indentation test method, CVD diamond film, adhesion property, residual stress
