摘要
设计了一台抑制空间行波管多级降压收集极二次电子发射的、专用离子束处理设备。研究了Mo原子沉积速率对二次电子发射系数和表面织构的影响。无氧铜片基底上的试验结果表明,二次电子发射系数与Mo原子的沉积速率和表面织构密切相关。处理过程中基底温度起着重要作用。采用优化工艺得到的二次电子发射系数最大值下降到0.65,低于未经处理无氧铜基片的一半。初步试验表明,采用离子处理的多级降压收集极后,K和Ka波段的行波管的整管效率获得明显提高。
A dedicated ion surface treatment system was developed to deposit molybdenum ion on surfaces of the multistage depressed collectors （MDCs） in the space traveling tubes （TWT） so as to suppress the secondary electron emission. The influence of molybdenum ion deposition rate on the secondary electron emission ratio （8） and the surface texture of the oxygen free, high conductivity copper （OFHC） substrate was studied. The results show that the Mo deposition rate strongly affects the secondary electron emission ratio and the surface texture, and that the substrate temperature plays a key role in the formation of the desired surface texture. The surface modification reduces the maximum of δ to 0.65, a reduction higher than 50%. Moreover, the molybdenum ion deposition of the MDCs significantly improves the total efficiency of the K and Ka-band TWTs.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第3期247-250,共4页
Chinese Journal of Vacuum Science and Technology
基金
国家科技支撑计划空间行波管课题下属的子课题
关键词
离子表面处理
二次电子发射系数
空间行波管效率
Ion surface treatment, Secondary electron emission ratio, Space TWT efficiency
