期刊文献+

光栅光调制器的有源矩阵驱动的设计与优化

Design and optimization of active matrix addressing for grating light modulator
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摘要 通过提出一种光栅光调制器的有源矩阵的驱动方式,分析了有源矩阵光栅光调制器的工作机理和关键指标参数。并且分析指出增大有源矩阵的存储电容值,可以减小由电荷重新分布造成存储电压的降低。有源矩阵的晶体管宽长比和存储电容,影响有源矩阵的保持电压特性和开关速度。结合实际的工艺设计包,利用Cadence软件设计了有源矩阵的版图。设计了有源矩阵与光栅光调制器的单片集成的工艺流程。通过仿真和实验验证了理论分析的正确性,且仿真结果与实验结果基本一致,表明:有源矩阵光栅光调制器可以满足分辨率为1920×1080,帧频30Hz,256级灰度的显示要求。 An active matrix addressing of Grating Light Modulator (GLM) is proposed. Operating principle and key parameters of the active matrix GLM are analyzed. It' s indicated that the dropped storage voltage that results from charge redistribution can be reduced by increasing the value of storage capacitance. Storage capacitance and the width to length ratio of the transistor influence on the holding-voltage characteristic and switch speed. With actual Process Design Kit (PDK) and Cadence software, the layout of the active matrix was designed. The monolithic process of the device was also designed. Simulation result and experiment result validate the correctness of the theoretical analysis and the designed circuits; and they are consistent basically. The result indicates that the active matrix addressing designed can be applied in a display system that has 1920×1080 resolution, 30 Hz frame frequency and 256 grayscale.
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2009年第5期893-898,共6页 Chinese Journal of Scientific Instrument
基金 国家自然科学基金(60708017) 重庆市院士基金(CSTC 2008BC3002)资助项目
关键词 微机电系统 光栅光调制器 有源矩阵 单片集成 MEMS grating light modulator active matrix monolithic integration
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参考文献9

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