摘要
用锥光全息非接触式测量系统进行距离测量的精度会受到系统自身的原理结构和光学元件布局的影响,重点分析光路中的核心元件偏光晶体等器件自身的固有属性和相对位置对测量结果的影响,并讨论了相应的调整和补偿措施。在理论和实验结合下,确定各个仿真参数,通过仿真的变化曲线深入分析了引起相位误差和设定的绝对相位零点偏移的原因,并讨论了提高测量系统精度的相位差放大方法,对优化设计和调试锥光全息测试系统及提高测量系统精度具有重要意义。
The accuracy of distance measurement using non-contact measurement based on conoscopic holography is influenced by its principle structure and the distribution of the optical elements. Measurement result is affected by inherent attribution and relative place of polarized light crystal in optical path, which is analyzed in this paper and corresponding methods of adjustment and compensation are discussed. Simulation parameters are set by combining theories and experiments. The cause of phase error and absolute phase zero shift is analyzed by simulation curves. Expending phase difference to improve the accuracy of the system is also proposed, which is important to optimize the design and debug the measurement system based on conoscopic holography, and improve the accuracy of the system.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2009年第5期1100-1104,共5页
Chinese Journal of Scientific Instrument
关键词
锥光全息
非接触测量
相位差
偏光晶体
conoscopic holography
non-contact measurement
optical path difference
polarized light crystal
