摘要
研究了用工业ＩＣ技术和微细加工技术制造的硅基双层薄膜谐振器的工作机理，并建立了数学模型．对薄膜谐振效率、振幅及声产生效率与薄膜厚度、初始应力的关系进行了理论分析和计算，理论曲线与实验结果符合得很好．最后，给出了电热激励薄膜谐振器的优化设计方法．
The mechanism of Si based bi layer resonator realized with IC technology and micromachine technology was investigated.The model of this kind of devices was attained.The theoretical analysis and calculation was take to the relations of resonant frequency ,vibration amplitude with thickness of membrane, initial stress.The theoretical result meet well with that of experiments.Consequently, the method for optimal design was presented.
出处
《西北建筑工程学院学报（自然科学版）》
CAS
1998年第2期7-13,共7页
Journal of Northwestern Institute of Architectural Engineering
基金
国家自然科学基金
关键词
电热激励
薄膜谐振器
数学模型
优化设计
ultrasound wave,inner stress
bi layer membrane
electric thermal stimulation
