摘要
采用平直钨丝作热解源,并借助钨丝支架的弹性恢复力,较好地解决了热丝热解化学气相沉积法(HFCVD)合成金刚石过程中热解丝的变形问题.样品独立加热,基片温度、钨丝温度、钨丝与样品基片距离均可独立调节.装置改进后,在Si(100)上合成了面积大约45mm×25mm的比较均匀的金刚石膜.用扫描电子显微镜(SEM)、Raman光谱和X射线衍射仪对制备的金刚石膜进行了分析.
This paper presents an effective solution to the problem of hot-filament distortion in the process of synthesizing high-performance diamond films by hot-filament chemical-vapordeposition(HFCVD) with the aid of the resilience of the filament support. The substrate temperature, the tungsten filament temperature and the dis-tance between the substrate and the tungsten can be adjusted to work within their expected rang by using a sub-strate heater. The uniform polycrystalline diamond films with an area of more than 45mm×25mm each are suc-cessfully synthesized from the gaseous mixture of CH4 and H2 on Si (100) substrate. The diamond films are ana-lyzed by SEM, XRD and Raman spectroscopy.
出处
《理化检验（物理分册）》
CAS
1998年第6期14-16,36,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
广东省自然科学基金 B6-102-234
