摘要
主要介绍了MEMS加速度计的六位置测试法,根据MEMS加速度计输出数学模型详细推导了如何得到MEMS加速度计的输出数学模型中的刻度因数、零偏以及安装误差,并在得到其标定系数后将其封装在C函数中进行了验证实验。通过实验数据分析可知,MEMS加速度计的六位置测试法原理简单、易于实现,且精度较高。这种标定法所得到的MEMS加速度计输出能够比较准确地反映其输出,而且MEMS加速度计的线性度有所改善。
A six-position testing method of MEMS accelerometer is introduced mainly. According to the error model of MEMS accelerometer the scale factor of MEMS accelerometer, bias of MEMS accelerometer and error on installation of MEMS accelerometer are derived. When the user gets these parameters, the user should pack the function of the concrete mathematics model in C code. By analyzing the results of examination, the six-position testing method of MEMS accelerometer is simple on principle, easy to realize and high in precision as long as the user gets the error model of MEMS accelerometer. And the scale factor nonlinearity is improved by the error model of MEMS accelerometer.
出处
《测控技术》
CSCD
北大核心
2009年第7期11-13,17,共4页
Measurement & Control Technology