摘要
为减小莫尔条纹信号不正交时的正切法细分误差,提出了一种可对任意相位滞后误差进行实时补偿的新算法。在分析了相位不正交对细分精度的影响后,通过对信号过零点的准确采样,计算出余弦信号相位滞后的角度值,进而确定了实际的相位计算公式。根据存在相位滞后信号的极性和幅值信息,对完整的短周期信号进行相位分段补偿,并分析了影响算法实现的各个因素。仿真实验表明,本算法可实现对相位滞后误差的实时补偿,有效降低信号相位不正交对细分精度的影响,使细分误差仅为未补偿误差的10%,极大地提高了莫尔条纹信号细分精度和位移检测精度。
In order to eliminate the tangent subdivision error caused by nonorthogonal Moire fringe signals, a new algorithm is presented to compensate the real-time phase laggard error. After analyzing the effect of the phase nonorthogonality on subdivision precision, the cosine signal phase error is worked out based on sampling the signal with zero value well and the actual phase formula is determined clearly. According to the polarity and amplitude of the signal with laggard phases, the shorter periodic signals are compensated in a certain section phase respectively and the factors influencing the compensation precision are analyzed. Experimental data indicate that this algorithm can compensate the phase error perfectly and can depress the effect of the nonorthogonal signals on the subdivision precision. Obtained results show that the subdivision error by using the proposed method reduces to 10 percent of the original error and the subdivision and location preeisions are improved greatly.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2009年第7期1694-1700,共7页
Optics and Precision Engineering
基金
江苏省精密与微细制造技术重点实验室开放基金资助项目(No.20060306)
国家自然科学基金资助项目(No.50605031)
关键词
莫尔条纹
细分
相位
补偿
Moire fringe
subdivision
phase
compensation
