摘要
采用室温磁控溅射技术在镁合金(AZ91D)表面制备DLC/SiC/Ti(类金刚石/碳化硅/钛)多层膜(SiC,Ti为中间层),研究了薄膜的纳米压痕行为和膜基系统的摩擦磨损性能。试验结果表明:DLC薄膜具有低的纳米硬度(4.01GPa)和低的弹性模量(40.53GPa),但具有高的硬弹比(0.10);膜基系统具有好的摩擦磨损性能;在以氮化硅球为对磨件的室温干摩擦条件下摩擦系数平均约为0.19,与镁合金相比,磨损速率低了约三个数量级,膜基系统经3.5h磨损后,未出现裂纹和剥落,显著改善了镁合金的抗磨损性能。
The nano-indentation and friction/wear properties of DLC/SiC/Ti （ diamond-like carbon/silicon earbide/Ti） thin films （ SiC and Ti films as interlayer） deposited on Mg alloy （AZ91 D） substrate using magnetron sputtering technique at room temperature was investigated. The results show that the DLC film exhibits a low nano-hardness （4.01 GPa）and Young＇s modulus （40.53 GPa）but the ratio of hardness to modulus （0.10）is high. When sliding against Si3 N4 （silicon nitride） ball using ball-on-disc frictional and wear tester under dry frictional condition, the films-substrate system exhibits a good film-substrate adhesion and a good friction/wear properties with the friction coefficient about 0.19. The special wear rate is decreased 3 orders of magnitude together with little film cracking and interface delaminating after long time worn（ 3.5h）. The film-substrate systems greatly improve the friction/wear properties of magnesium alloy.
出处
《航空材料学报》
EI
CAS
CSCD
北大核心
2009年第4期47-51,共5页
Journal of Aeronautical Materials
基金
江苏大学优秀学术青年骨干培养对象基金
江苏省摩擦学重点实验室基金(kjsmcx06005)资助
关键词
镁基材
薄膜
摩擦磨损
磁控溅射
Mg substrate
thin films
friction and wear
magnetron sputtering
