摘要
介绍了双频激光干涉仪的原理,并设计了机床精度测量方案。在分析检测过程存在的多种误差的基础上,采用HP5519B双频激光干涉仪实现了TH5680立式加工中心X轴定位精度等的检测。结果表明:增量型的螺距补偿方式有效改善了定位精度和其他机床精度;同时证明了软件补偿方式在保证机床精度检测方面的重要性。
The dual-frequency laser interferometer principle and the design of measurement method of machine tool accuracy were discussed. The laser interferometer of HP5519B was used to realize the measurement of X-axis positioning accuracy of TH5680 vertical machining center. The results show that positioning accuracy and other accuracies are improved effectively using increment-type for pitch compensation mode, and soft compensation mode is proved to be importance in accuracy measurement of machine tools.
出处
《机床与液压》
北大核心
2009年第8期165-168,174,共5页
Machine Tool & Hydraulics
关键词
激光干涉仪
精度
误差分析
机床检测
Laser interferometer
Accuracy
Error analysis
Machine tool measurement
