摘要
介绍了用电火花成形机在半导体硅片上开展加工孔和槽的研究情况 ,并对硅片的固定。
出处
《电加工》
1998年第3期30-31,共2页
同被引文献19
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引证文献2
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1曹振中,左敦稳,黎向锋,卢文壮.CVD金刚石厚膜电加工表面粗糙度分析[J].金刚石与磨料磨具工程,2005,25(1):11-14. 被引量：2
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2肖任勤,汪炜,刘志东,田宗军,邱明波.电火花电解复合切割多晶硅的表面形貌及减反射特性研究[J].机械科学与技术,2009,28(5):605-608. 被引量：1
二级引证文献3
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1高峰,于立军,丁战辉,马红安,李春杰,蒋青.完整晶面金刚石的粒度极限研究[J].金刚石与磨料磨具工程,2011,31(5):1-4.
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2湛玉龙,马志斌,翁国峰,吴建鹏.基体对金刚石厚膜质量的影响研究[J].金刚石与磨料磨具工程,2011,31(5):5-9. 被引量：2
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3成健,陈宇龙,谢丰,黄志远,李帅,翟中生,刘顿.纳秒-飞秒激光复合制备TC4合金高抗反射表面[J].中国表面工程,2023,36(5):156-166. 被引量：1
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1张桦.线切割加工中电参数的分析研究[J].内蒙古科技与经济,2008(14):210-210. 被引量：1
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2许雪峰,胡建德,彭伟.电泳磨削影响因素的探讨[J].机械工程师,1997(6):1-2. 被引量：1
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3王炜,李长荣,杜振民,郭翠萍.Si/(Ni-Cr合金)/Cu扩散偶950℃相稳定性[J].北京科技大学学报,2009,31(3):371-375. 被引量：4
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4景想云.数控线切割产生加工误差的原因分析[J].装备维修技术,2010(4):14-18. 被引量：1
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5电子自旋极化首次在室温下实现[J].广西科学院学报,2009,25(4):302-302.
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6杨薇,朱红钢.燃机动环油膜槽的超精密电加工技术[J].电加工与模具,2012(3):57-59. 被引量：1
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7黄玉萍.扭杆弧形槽精密微细电火花加工工艺研究[J].中国机械工程,2016,27(11):1446-1450.
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8X61 102082M-5PT型研磨机 X62 102082M-5PT型抛光机[J].电子工业专用设备,2011,40(7):68-69.
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9X61 102082M-6PT型研磨机 X62 102082M-6PT型抛光机[J].电子工业专用设备,2011,40(7):67-68.
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10X61 102082M-7PT型研磨机 X62 102082M-7PT型抛光机[J].电子工业专用设备,2011,40(7):66-67.
