摘要
介绍了93k集成电路测试系统校准原理与实现方法,讨论了校准过程中的量值传递关系;以HPP-MU为例,给出了量值传递的实现过程,并分析了93k校准原理与方法在确保量值准确、一致性上的优点。
Describes the principle and method of calibration on 93k IC test system,and discusses the relations of dissemination of the value of a quantity. It also takes HPPMU for example to illuminate the process of dissemination of the value of a quantity, finally analyses the advantages of the presented method for calibration on 93k IC test system.
出处
《宇航计测技术》
CSCD
2009年第3期66-69,共4页
Journal of Astronautic Metrology and Measurement
关键词
校准
基准
内部参考源
中间参量
系统参量
Calibration Premier standard Internal reference Interim parameter System pa-rameter
