摘要
351nm波长的准分子激光器由光波导管作为激光均束器,直接输出正六角形均匀分布的照明光束,能在大面积激光投影光刻中实现无缝扫描。同目前常用的微透镜阵列器相比制作简单,无须光阑就能直接获取所需要的六角形光束,减少了能量损失。通过合理的假设和理论推算,依据管内最大反射次数就能适当地选取光波导管的长度,既保证了足够的反射次数以维持良好的均匀性,同时又避免了不必要的管长所带来的更多反射损耗。利用ZEMAX光学设计软件模拟和分析了由光波导管输出的照明光。结果表明,输出的六角形光束的相对光通量为96%,近似于平顶的能量分布,呈现出了极好的均匀性。
For 351rim excimer suited for conventional photoresists exposure, light-guide wall used for laser beam homogenizer directly outputs an illuminated hexagonal beam appeared as uniformity which can achieve completely seamless scanning lithography in the large-area laser projection system. This homogenizer can be made more simply and easily than microlens arrays most in use. Meanwhile, with no diaphragm, the desired hexagonal light beam can be directly obtained in order to reduce energy loss. By means of reasonable hypothesis and theoretical calculation, the length of light-guide wall can be properly chosen by the maximum reflective number of times in the tube. It can be ensured that enough reflective number of times keeps a good uniformity. It can be also avoided that unnecessary length of tube leads to much reflective loss. The output illumination of the light guide wall is simulated and analyzed by using ZEMAX optical design software. The results show that the relative irradiance of output hexagonal light beam reaches 96 %, and the nearly flat-top intensity profile demonstrates very good uniformity.
出处
《光学技术》
CAS
CSCD
北大核心
2009年第4期615-617,621,共4页
Optical Technique
基金
广东省自然科学基金资助项目(07001789)
广东省科技计划资助项目(2007B010400071)
关键词
准分子激光器
均束器
光波导管
光刻
无缝扫描
光学设计
excimer
beam homogenizer
light-guide wall
lithography
seamless scan
optical design
