摘要
A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software.
A displacement sensor based on the fiber Fabry-Perot （F-P） cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit （PZT） was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method （FEM） nd ANSYS software.
基金
Project (No. 111303-8112D2) supported by the National DefenseResearch Foundation of Zhejiang University, China
