摘要
本文采用直流反应磁控溅射法及能量过滤磁控溅射技术,以玻璃为衬底制备了纳米TiO2薄膜和纳米TiO2/ITO复合薄膜。利用X射线衍射(XRD)、扫描电镜(SEM)、紫外-可见分光光度计(UV-VIS)、椭偏光谱仪(VASE型)和接触角测定等手段对薄膜进行了表征。研究表明:纳米TiO2/ITO复合薄膜表面水的初始接触角较纳米TiO2薄膜明显减小,ITO膜层的存在抑制了光生载流子的复合,在紫外光照射5min后接触角迅速下降,紫外光照射30min后接近0°,亲水性较纳米TiO2薄膜有明显提高;应用能量过滤磁控溅射技术制备的薄膜晶粒尺寸减小至10nm左右,薄膜表面平整,吸收边波长"蓝移"至320nm;纳米TiO2/ITO复合薄膜在可见光波段的透过率下降至60%左右,较纳米TiO2薄膜的80%明显降低。
The titanium dioxide and titanium dioxide/indium tin oxides （TiO2/ITO）composite nano-films were deposited by DC reactive magnetron sputtering （DMS） and by energy filtered magnetron sputtering （EFDMS）, respectively, on glass substrates. The microstmctures and properties of the films were characterized with X-ray diffraction （XRD）, scanning electron microscopy （SEM）, uhra violet visible light （UV-Vis） transmittance spectroscopy, ellipsometry and water contact angle measurement. The results show that the hydrophilicity of TiO2/ITO films is considerably higher than that of the TiO/films, possibly because of the small grain sizes and because of the reduction of carrier recombination by the ITO layer. After ultraviolet light irradiation for 30 min, the water contact angle of the TiO2/ITO films, grown by EFDMS, rapidly drops from 110°to about 0°. and its transmittance in visible light region, lower than 80% of the TiO2 films grown by DMS, drops to 60%. Besides, the Ti02 grain size was found to be 10nm, and the blue-shift to 320nm of its absorption edge was observed.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第5期576-579,共4页
Chinese Journal of Vacuum Science and Technology
基金
教育部重点项目基金(No.205091)
