摘要
码盘、光栅盘是光电位移精密测量仪器和光栅计量测试设备中的核心元件。目前,码盘、光栅的基片主要是K9玻璃、浮法玻璃、不锈钢及菲林胶片,但它们无法适应振动强、冲击大等恶劣环境的要求。为了解决上述矛盾,采用新型的材料--光学树脂作为基片进行码盘、光栅盘的制作,通过分析部分光学树脂特别是聚甲基丙烯酸甲酯(简称PMMA)、聚碳酸酯(简称PC)、聚苯乙烯(简称PS)的光学特性,在研究现有光刻复制工艺的基础上,采用新型的制作技术制作出PC树脂基片的光栅盘,在45倍显微镜下观察,线条陡直、无龟裂,试验结果表明该工艺可行,工艺参数正确,为进一步研制以树脂码盘、光栅盘为核心元件的测量仪器和光栅计量设备提供了试验基础。
Code disc or grating disc is the core component ofphotoelectric displacement precision measuring instrument and grating measuring equipment. At present, K9 glass, float glass, stainless steel and film are used to making code disc or grating disc as main base slice. But they can＇t adapt to bad environment such as strong vibration, big impact. In order to solve the contradiction above, we adopt optical resin as new type material to make code disc or grating disc. The PC grating disc is developed used a new making technology by analyzing the optical characteristic ofpart optical resin, especially Polymethylmecrylate（abbr. PMMA）, Polycarbonate（abbr. PC）, polystyrene（abbr. PS） and based on researching actual photolithography copy technology. The edges of lines are vertical and crack-free which are observed under 45 times microscope. The results indicate that the technology is feasible and technologic parameters are correct, which provide examination basis to develop measuring instrument or grating equipment by using new type material core slice.
出处
《长春理工大学学报（自然科学版）》
2009年第2期189-192,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
中国科学院"优秀博士学位论文
院长奖获得者科研启动专项资金"资助项目(076131G070)
关键词
光学树脂
基片
码盘
光栅盘
光学特性
optical resin
base slice
code disc
grating disc
optical characteristic
