摘要
微惯性开关作为微惯性传感器中的一类特殊器件在设计方面因应用背景的差异存在多种技术方案。通过描述惯性开关的工作原理和分类,介绍了国内外微惯性开关的研究概况,针对线性低g值微惯性开关闭合接触力小,触点接触弹跳,硅基导电性较差等共性问题进行了分析和讨论,提出了引入静电力或磁力以增大接触力,采用柔性接触结构以实现平稳接触,采用硅金属化工艺以实现良好的导电性等解决办法,可供微惯性开关结构设计时参考。
The micro inertial switch is one of the special device among the micro inertial sensors. Many kinds of technological methods are applied to design the micro inertial switch due to different applications. Some representative design methods are discussed generally. The working principle and category of the inertial switch are described. The research status in quo at home and abroad of the micro inertial switch are introduced. The common problems which encountered in design and fabrication of inertial switch, such as the contact force is very small when the low-g inertial switch turns on, the contact bounce, the conductivity of switch made of silicon is imperfect etc., are analysed and discussed. The solutions to these problems, such as utilizing additional electrostatic or magnetic force to increase the contact force, utilizing flexible structure to achieve stable contact, utilizing metallized silicon to achieve good conductivity etc., are proposed for reference of inertial switch structural design.
出处
《信息与电子工程》
2009年第5期439-442,共4页
information and electronic engineering
关键词
惯性开关
接触力
惯性
微电子机械系统
inertial switch
contact force
inertia
Micro-Electro-Mechanical-Systems
