摘要
采用ＭｏｎｔｅＣａｒｌｏ方法，模拟了磁场影响下矩形空心阴极放电中电子的运动及其产生非弹性碰撞情况，得到了终止条件下电子的能量分布、空间分布，以及离子的空间分布．磁场的引入改变了电子的行程和产生各种非弹性碰撞的次数与位置，影响了整个放电过程．电子的各种参数分布的差异，正是由少数非弹性碰撞决定的．通过模拟得到：在恰当的磁场强度下，可改变电子的位置和能量分布，使总的离化数增加，改变负辉区和阴极位降区的离子分布，这对于更有效地控制激励、溅射和转荷反应过程，稳定放电有一定的指导意义．
The electron motion confined by a transverse magnetic field in a hollow cathode discharge is investigated. Some swarm parameters are obtained such as the energy and the spatial distribution in the terminative condition. Due to the existence of a transverse magnetic field, the motion of electrons are changed and thus all kinds of the inelastic collision are different from the one in the zero magnetic field. The results from the simulation show that the swarm parameters can be changed when the magnetic field intensity chosen fitly.
出处
《华中理工大学学报》
CSCD
北大核心
1998年第9期55-58,共4页
Journal of Huazhong University of Science and Technology
关键词
计算机模拟
空心阴极放电
磁约束放电
激光器
computer simulation
hollow cathode discharge
discharge confined by magnetic field
