摘要
通过添加Al2O3改善了钙硼硅玻璃基板材料的失透现象,研究了Al2O3对钙硼硅材料的烧结性能、相组成、线膨胀系数和介电性能的影响。结果表明:试样的晶相均为CaB2O4、α-石英和CaSiO3,添加Al2O3不能改变晶相种类。当w(Al2O3)为9%时,基础玻璃由失透变为透明;线膨胀系数降低至10.5×10–6℃–1,tanδ低于1.1×10–3,Al2O3添加前后,试样的εr变化不大(10MHz)。
The devitrification of calcium borosilicate glass substrate materials was improved by adding Al2O3. And the influences of adding Al2O3 on sintering properties, phase compositions, microstructures and dielectric properties of the glass were also discussed. The results show that the devitrifying glass becomes transparent and linear expansion coefficient reduces to 10.5×10^-6 ℃^-1 with adding w（Al2O3） of 9%. The main crystal phases of samples are CaB2O4, a-silica and CaSiO3＇ At 10 MHz, the permittivity εr of simples changes a little with the mass fraction of Al2O3 from 0 to 9% and the dielectric loss tanδ is also below 1. 1×10^-3 at best sintering temperature.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2009年第11期56-59,共4页
Electronic Components And Materials
基金
国家"863"计划资助项目(No.2007AA03Z455)
关键词
无机非金属材料
低温共烧陶瓷
钙硼硅玻璃
介电性能
non-metallic inorganic material
LTCC
calcium borosilicate glass
dielectric properties
