摘要
文章对石墨、金刚石、非晶碳及碳纳米管等常用场发射冷阴极材料的结构、在场发射方面的应用和发展进行了介绍和分析,认为碳纳米管是场发射冷阴极的首选材料。并结合其原理和性能对电弧放电法、脉冲激光熔蒸法、化学气相沉积法、等离子增强化学气相沉积法等场发射阴极制备方法进行了探讨,认为等离子增强化学气相沉积法因可以实现低温原位生长而具有较好的发展趋势。
The structure and the development on field emission of the graphite,diamond,amorphous carbon and CNTs are analyzed,the results show that CNTs is the best cathode material for the FED.The synthesized methods like EAD,PLA,CVD,PECVD are discussed according to their principles and characteristics,the results show that PECVD is the most promising,because which can deposit on electrode at a low temperature.
出处
《现代显示》
2009年第11期45-49,共5页
Advanced Display
基金
教育部科学技术研究重点项目资助(205091)
关键词
场致电子发射
阴极材料
制备方法
field emission
cathode material
synthesized technology
