摘要
介绍了Lucovsky方程及稳态情况下PSD的位置测量公式。以两面型PSD为例,给出了在极短脉冲光照下,基于PSD稳态公式的测量效果位置网格图。针对存在的误差较大问题,提出了一种积分测量方法,并给出了极短脉冲光照下,基于积分检测法的位置网格图。从图中可以看到,采用积分方法进行PSD位置测量具有很高的精度。
The Lucovsky equation and the position detecting formulation of PSD under stable situation are briefly introduced. With the instance of Duo-lateral PSD, a position detecting effect gridding chart of PSD based on the stable situation formulation and under the excitation of very-short-pulse illumination is showed. Pointing to the problem of a bad linearity,an integral detecting method is worked out. And the position detection effect gridding chart based on this method and under the excitation of very-short-pulse illumination is showed too. From the chart we can obviously see that it provides a very high precise to adopt the integral method on the PSD detection.
出处
《激光与红外》
CAS
CSCD
北大核心
2009年第11期1174-1176,共3页
Laser & Infrared
