摘要
构造了薄膜生长的蒙特卡罗模型,并应用该模型研究了薄膜生长初期岛的形貌.模型中考虑了主要的3个动力学过程:原子沉积、原子扩散及原子脱附,并且认为这3个过程既相互独立又相互影响,即在同一计算步长中,3个过程依据各自速率所构造的概率发生,同时扩散及脱附速率是随着沉积过程的进行而变化的.结果表明,当基底温度较低或者沉积速率较快时形成分形岛;而当基底温度较高或者沉积速率较慢时形成紧致岛.这一结论也得到了实验的验证.
A Monte Carlo model to simulate thin film growth is constructed morphology of thin film growth at initial stage is investigated using this model. and the island Three kinds of dynamic processes, i. e. , deposition, diffusion and revaporation are considered to be independent and interactional, which means that each of the three processes will happen in one Monte Carlo step according to their rate, the diffusion and revaporation rates are variable in the growth process. The results indicate that when the substrate temperature is lower or deposition rate is larger, the island is fractural, but when the substrate temperature is higher or deposition rate is less, the island is compact. These phenomena are consistent with those of experiments.
出处
《大连理工大学学报》
EI
CAS
CSCD
北大核心
2009年第6期781-785,共5页
Journal of Dalian University of Technology
基金
"九七三"国家重点基础研究发展计划资助项目(2005CB321704)
关键词
薄膜生长
蒙特卡罗模型
形貌
thin film growth
Monte Carlo model
morphology
