期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

一种新型聚合物微透镜阵列的制造技术 被引量：18

New Technology for Fabrication of Polymer Microlens Arrays
原文传递
导出
摘要 提出了一种利用软模压印制备微透镜阵列的技术。采用传统的光刻胶热熔方法制备微透镜阵列母板,利用复制模具的方法在聚二甲基硅氧烷(PDMS)上得到一个和母板表面图形相反的模具,最后通过压印的方法把PDMS模具上的图形转移到涂有紫外固化胶的玻璃基片上,待紫外胶完全固化后可得到和母板一致的微透镜阵列。经过测试微透镜阵列的焦点图像和表面形貌可发现最后制备的微透镜阵列表面形貌均匀、聚焦性能良好、光强均匀。 A method for fabrication of microlens arrays using soft lithography is reported. The master of the microlens array is fabricated by traditional thermal reflow technology. The microlens array is first transferred on an elastomeric mold using replica molding method,and then the elastomeric mold with microlens structure on its surface is imprinted on the glass substrate with ultraviolet （UV） curable polymer on it. After the UV glue was fully solidified,the final microlens array is formed on the UV curable polymer of glass substrate. The microlens array is tested and it is found that it has uniform focusing function. This technology has great potential application for fabrication of polymer microlens array with low cost and high throughput.
作者 王伟 周常河
机构地区 中国科学院上海光学精密机械研究所信息光学实验室 中国科学院研究生院
出处 《中国激光》 EI CAS CSCD 北大核心 2009年第11期2869-2872,共4页 Chinese Journal of Lasers
基金 国家自然科学基金(60878035) 国家973计划(2006CB80600)资助课题
关键词 光学制造 微透镜阵列 光刻胶热熔法 软刻蚀 压印技术 optical fabrication microlens array thermal reflow soft lithography imprint technology
分类号 O435 [机械工程—光学工程] TN205 [电子电信—物理电子学]
  • 相关文献

参考文献21

  • 1Z. D. Popovic, R. A. Sprague, G. A. N. Connell. Technique for monolithic fabrication of microlens arrays[J]. Appl. Opt. , 1988, 27(7): 1281-1284.
  • 2Weixing Yu, X.-C. Yuan. UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask[J]. Opt. Express, 2003, 11(18): 2253-2258.
  • 3K. F. Chan, Z. Feng, R. Yang et al.. High-resolution maskless lithography[J]. J. Microlithogr. Micro fabrication Microsyst. , 2003, 2(4): 331-339.
  • 4M. Fritze, M. B. Stern, P. W. Wyatt. Laser-fabricated glass microlens arrays[J]. Opt. Lett., 1998, 23(2): 141-143.
  • 5M. V. Kunnavakkam, F. M. Houlihan, M. Schlax et al.. Low- cost, low-loss rnicrolens arrays fabricated by soft-lithography replication process [J]. Appl. Phys, Lett. , 2003, 82 ( 8): 1152-1154.
  • 6Chih-Yuan Chang, Sen-Yeu Yang, Long-Sun Huang et al.. Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer [J]. Opt. Express, 2006, 14(13): 6253-6258.
  • 7R. K. Dutta, J. A. van Kan, A. A. Bettiol et al.. Polymer microlens replication by nanoimprint lithography using proton beam fabricated Ni stamp[J]. Nucl. Instrum. Meth. B, 2007, 260:464-467.
  • 8Can Peng, Xiaogan Liang, Zengli Fu et al.. High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing[J]. J. Vac. Sci. Technol. B, 2007, 25(2) : 410-414.
  • 9Y. Xia, G. M. Whitesides. Soft lithography[J]. Angew. Chem. Int. Edit. , 1998, 37:550-575.
  • 10S. R. Quake, A. Scherer. From micro-to nanofabrication with soft materials[J]. Science, 2000, 290(5496): 1536-1540.

二级参考文献42

  • 1王顺权,周常河,茹华一,张妍妍.深刻蚀高密度熔融石英光栅[J].中国激光,2006,33(2):175-178. 被引量：2
  • 2Deer Yi, Yingbai Yan, Haitao Liu et al.Broadband polarizing beam splitter based on the form birefringence of a subwavelength grating in the quasi-static domain[J]. Opt.Lett., 2004, 29(7) :754-756
  • 3Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom.Nanoimprint lithography[J].J. Vac. Sei. Technol. B, 1996,14(6) :4129-4133
  • 4M. G. Moharam, T. K. Gaylord. Rigorous coupled-wave analysis of metallic surface-relief gratings[J]J.Opt. Soc.Am. A, 1986, 3(11):1780-1787
  • 5Tadeusz Kryszczynski.Precise algebraic method to solve the noncemented two-lens objective free from the aperture aberrations[J].SPIE,1999,3779:178-189.
  • 6Raymond J.Beach,Mark A.Emanuel.Applications of Microlens-Conditioned Laser Diode Arrays[J].SPIE,1995,2383:283-297.
  • 7Jahns J.Intergrated optical imaging system[J].Applied Optics,1990,29(14):1990-1998.
  • 8Neil Davies.Three-dimensional imaging system:A new development[J].Applied Optics,1988,27(21):4520-4528.
  • 9Oikawa M,Iga K,Sanada T.Array of distributed-index planar micro-lenses prepared from ion exchange technique[J].Jpn.J.Appl.Phys,1981,48(1):49-50.
  • 10Borrelli N F,Morse D L,Bellman R H,et al.Photolytic technique for producing microlenses in photosensitive glass[J].Applied Optics,1985,24(16):2520-2525.

共引文献23

同被引文献187

引证文献18

二级引证文献120

中国激光
2009年 第11期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部