摘要
线加速度计是惯性测量和导航系统的主要惯性元件之一。当前，传统的力再平衡摆式加速度计占据加速度计的主要市场。对加速度计输出数字化的迫切要求，推动了石英振梁式加速度计的发展。随着微电子加工技术向惯性技术的渗透，微硅加速度计已崭露头角并受到广泛的关注。
Linear accelerometer is one of the main inertial devices in inertial measuring and navigation systems.At present,the traditional force re balance pendulum accelerometer occupies the dominant position in accelerometer market.The urgent demand for output digitalization of accelero meters has improved the development of quartz vibrating beam accelerometer.As the microelectronic processing technology permeated into inertial technology,Si microaccelerometer has put a new face on this fiele and attracted much attention.
出处
《压电与声光》
CSCD
北大核心
1998年第5期313-321,共9页
Piezoelectrics & Acoustooptics
关键词
线加速度计
石英振梁
微机械
linear accelerometer,quartz vibrating beam,micromachine
