摘要
介质阻挡放电(DBD)可以在大气压下产生低温等离子体,在工业领域具有广泛的应用前景。相对于低气压均匀DBD和大气压丝状DBD,大气压均匀DBD在节约生产成本、提高生产效率以及优化处理效果等方面都体现着明显的优势。目前,大气压均匀DBD的工作气体多为惰性气体,这不仅增加了生产成本而且降低了生产效率。近期研究表明,通过改变DBD系统的一些参量,如供电电源、电极结构、阻挡材料等,可以在空气中实现均匀稳定的DBD。目前国内外一些研究小组已经在这些方面取得了可喜的研究成果。本文在讨论DBD的产生方法、机理以及诊断技术的基础上,分别从电源类型、电极结构以及预电离技术等方面综述了空气中均匀DBD的研究现状,最后分析了实现空气中均匀DBD需要解决的问题。
The latest progress in research,development,and industrial applications of the homogeous dielectric barrier discharge（DBD）technology under atmosphere pressure was tentatively reviewed in a thought provoking way. The discussion centers on the strengths of the DBD technology, such as low cost, high efficiency, film quality optimization, and its possible industrial applications. The technical problem that inert gas protection increases the cost and lowers the efficiency can be solved by a judicious choice of DBD conditions, including power supply, electrode geometry and barrier materials. The research projects of technological interest, its discharge mechanisms and its diagnosis methods in particular, were also discusscd.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第6期649-658,共10页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金资助(No.50707012)
关键词
介质阻挡放电
综述
空气
电源类型
电极结构
Dielectric barrier discharge, Review, Air, Power types, Electrode configuration
