摘要
基于硅烷热分解的总体反应模型，利用Fluent软件模拟了钟罩式硅烷分解炉内同时发生的传热、传质和热化学反应过程。模拟结果定量地表述了传统硅烷分解炉内发生的各个过程，借此探讨了分解炉内的气压、硅棒温度和硅烷流量等工艺条件对硅烷热分解沉积硅转化率及能耗等技术指标的影响。指出硅棒温度为700-800℃，炉内压力升高至0．3MPa时，有利于提高硅烷分解率，抑制硅粉的产生和降低能耗。
Based on the global reaction model of silane thermal decomposition, the computational fluid dynamics code FLUENT is adopted to simulate the heat transfer, mass transfer and the thermal chemical process that happened in a traditional silane decomposer. The results quantitatively express the individual process in the decomposer. It is shown that under proper temperature range and a higher pressure, powder formation can be inhibited and a higher yield and a less energy consumption can be obtained. Setting rods temperature between 700-800℃ and arising total pressure to 0. 3MPa can improve silane decomposition rate, restrain powder formation and reduce energy consuming.
出处
《浙江理工大学学报（自然科学版）》
2009年第6期901-905,共5页
Journal of Zhejiang Sci-Tech University(Natural Sciences)
关键词
硅烷
热分解
数值模拟
silane
thermal decomposition
numerical simulation
