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高功率直流电弧等离子体喷射法制备的金刚石厚膜中黑色缺陷的研究 被引量:10

Research on Dark Features in Diamond Films Produced by DC Arc Plasma Jet Method
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摘要 借助激光标记的方法,对采用高功率直流电弧等离子体喷射法制备的金刚石膜中的黑色缺陷进行了定点表征。结合使用光学显微镜、激光扫描共焦显微镜、扫描电子显微镜、电子背散射衍射技术等多种表征方法,对同一样品的特定微观标记区域进行了多角度的分析。实验结果表明:金刚石膜内部的黑色缺陷是一种存在于晶界处的孔洞与质量较低的金刚石相的复合体,它的形成应与金刚石膜中某些晶界处的生长环境有关。 Dark features in diamond films prepared by DC arc plasma jet method were investigated by a laser marking process and fixed5-point characterization. Optical microscopy, laser confocal scanning microscopy, scanning electron microscopy and electron backscattering diffraction methods were employed to analyze the defects at the same point. The results indicated that the dark features were such a kind of defects that embody pores and poor quality diamond phase located at grain boundaries of diamond films. The formation of the defects is related with the growth environment of the diamond films at specific grain boundaries.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2009年第6期1349-1354,共6页 Journal of Synthetic Crystals
基金 国家自然科学基金(No.10675017)
关键词 金刚石膜 黑色缺陷 激光标记 晶界 diamond film dark feature laser mark grain boundary
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  • 1Adam W, Bauer C, Berdermann E, et al. Review of the Development of Diamond Radiation Sensors [ J ]. Nuclear Instruments and Methods in Physics Research Section A (Accelerators, Spectrometers, Detectors and Associated Equipment) , 1999, 434: 131-145.
  • 2Polyakov V I, Rukovishnikov A I, Rossukanyi N M, et al. Photodetectors with CVD Diamond Films: Electrical and Photoelectrical Properties Photoconductive and Photodiode Structures [ J ]. Diamond and Related Materials, 1998, 7 (6) : 821-825.
  • 3Polyakov V I, Rukovishnikov A I, Rossukanyi N M, et al. Photoconductive and Photovoltaie Properties of CVD Diamond Films[ J]. Diamond and Related Materials, 2005, 14(3): 594-597.
  • 4Garin B M, Polyakov V I, Rukovishnikov A I, et al. Dielectric Loss and Energy Distribution of the Shallow Levels in CVD Diamonds [ J ]. Diamond and Related Materials, 2006, 15 : 1917-1920.
  • 5Ying X T, Xu X M. CVD Diamond Thin Film for IR Optics and X-ray Optics[J]. Thin Solid Films, 2000, 368: 297-299.
  • 6Rossi M C, Salvatori S, Galluzzi F, et al. Diamond Photoluminescence Spectra: Dependence on Excitation Energy and Microstructure [ J ]. Diamond and Related Materials, 1998, 7:255-260.
  • 7Yang J X, Duan X F, Lu F X, et al. The Influence of Dark Feature on Optical and Thermal Property of DC Are Plasma Jet CVD Diamond Films [J]. Diamond and Related Materials, 2005,14:1583-1587.
  • 8Karen M. Microvoids in Polycrystalline CVD Diamond[ J ]. Materials Research Society, 2000, 588:283-289.
  • 9Meykens K, Haenen K, Nesladek M, et al. Measurement and Mapping of Very Low Optical Absorption of CVD Diamond IR Windows [ J ]. Diamond and Related Materials, 2000,9 : 1021-1025.
  • 10郭世斌,王耀华,陈飞,吕反修,唐伟忠,佟玉梅.DC Arc Plasma Jet CVD金刚石自支撑膜的质量对物理性能的影响[J].功能材料,2007,38(A10):3802-3805. 被引量:2

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  • 1杨胶溪,段晓峰,吕反修,左铁钏,王凤莲.黑色组织对直流电弧等离子体喷射金刚石自支撑膜光学、热学性能的影响[J].红外技术,2005,27(2):175-178. 被引量:5
  • 2Garin B M, Polyakov V I, Rukovishnikov A I, et al. [J]. Diamond and Related Materials, 2006, 15: 1917-1920.
  • 3Karen M.[J]. Diamond Materials Research Society, 2000, 588: 283-289.
  • 4Giovanni R, Smereka, P. [J]. Society of Industrial and Applied Mathematics, 2000, 6: 2073-2095.
  • 5Van der Drift A. [J]. Philips Research Reports, 1967, 22 : 267.
  • 6Wild C, Koidl P, Mueller-Sebert W, et al. [J]. Diamond and Related Materials, 1993, 2: 158.
  • 7Wild C, Kohl R, Herres N, et al. [J]. Diamond and Relate Materials, 1994, 3: 373.
  • 8Paritosh F, Srolovitz D J. [J]. Journal of Applied Physics, 2001, (89): 4857-4865.
  • 9Smereka P, Li X Q, Russo G, et al. [J]. Acta Materialia, 2005, 53: 1191-1204.
  • 10Tamor M A, Everson M P. [J]. Journal of Materials Research, 1994, 9(7): 1839-1848.

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