摘要
介绍的基于激光干涉的微位移测量仪具有分辨率高、结构简单、成本低的特点。该微位移测量仪由基于迈克尔逊激光干涉原理的微位移测量装置、工作台、光电阵列、信号处理电路、计算机及数据处理软件等组成。该测量仪位移测量理论分辨力可以达到0.01nm,特别适合范围在微米及微米以下的位移测量,可用于MEMS器件的位移检测,压电器件位移检测等。
A contact micro-displacement measuring instrument based on laser interference is introduced. It has the characteristics of high resolution, simple structure and low cost. The displacement measuring instrument consists of several parts： the micro- displacement measuring device based on Michelson interferometry using laser, the workbench, the optoelectronic arrays and its signal processing circuit, the computer and data processing software. The theoretical resolution of the displacement measurement may achieve 0. 01 nm. The instrument is particularly suitable for the micron, sub-micron measuring range and can be used to detect the displacement of MEMS devices, piezoelectric devices and so on.
出处
《工具技术》
2010年第1期105-108,共4页
Tool Engineering
关键词
计量学
微位移测量
激光干涉
十字片簧铰链
光电阵列
Metrology
micro displacement measurement
laser interference
crossspring hinge
optoelectronic arrays
