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用于微纳米测量的磁流变阻尼固紧系统 被引量:1

MRF Locking Damper for Micrometer/Nanometer Measurement
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摘要 研究用新型功能材料—磁流变液制作阻尼固紧器,具有减小电机振动和实现微冲击固紧工作台的双重功能.通过有限元分析对其磁路进行了仿真,并用往复运动实验系统对其性能进行了标定.在纳米三坐标测量机上进行的纳米定位实验表明,加上磁流变阻尼固紧器后,工作台定位稳态波动从20 nm减小到5 nm以内,可实现纳米三坐标测量机纳米级定位稳态波动. A locking damper based on the new functional materials, magnetorheological fluids, is studied. It can reduce vibration of driving motor and make a micro-impact locking for the working table. The magnetic circuit is simulated with finite element analysis and the property is calibrated using a reciprocating experimental system. It is used in Nano-CMM for nano-positioning experiments, showing that positioning steady-state fluctuation of the working table is reduced from 20 nm to less than 5 nm when the MRF locking damper is used. It ensures the nano-degree positioning steady-state fluctuation in Nano-CMM.
出处 《应用科学学报》 EI CAS CSCD 北大核心 2010年第1期106-110,共5页 Journal of Applied Sciences
基金 国家自然科学基金(No.50775063)资助
关键词 磁流变液 磁流变阻尼固紧器 微冲击固紧 定位 纳米三坐标测量机 magnetorheological fluids, MRF locking damper, micro-impact locking, positioning, Nano-CMM
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