摘要
进行了用直流放电等离子体法还原四氯化硅生产三氯氢硅的试验,反应器的功率达到30 kW,三氯氢硅单程收率超过了60%,每生产1 kg三氯氢硅耗电4.55 kW.h。通过计算得到了氢气解离度、电离度与温度的关系,归纳出氢气的比定压热容随温度变化的函数,根据试验结果确定了氢气和四氯化硅的最佳进料配比。
Experiments of silicon tetrachloride production by direct current discharge plasma reducing silicon tetrachloride were carried out. And it is found out that the reactor power reached 30 kW, the yield per pass was over 60%, and the electricity consumption was 4.55 kW · h per 1 kg silicon tetrachloride production. The relation of hydrogen gas dissociation degree and ionization degree with temperature has been obtained by calculation. The function of specific constant-pressure heat-capacity of hydrogen with temperature has been summerized. And the optimum feeding ratio has been determined by the experiment results.
出处
《氯碱工业》
CAS
2010年第1期30-33,共4页
Chlor-Alkali Industry
关键词
三氯氢硅
四氯化硅
直流放电等离子体
收率
能耗
trichlorosilane
silicon tetrachloride
direct current discharge plasma
yield
energy consumption
