摘要
微泵是微机电系统(MEMS)中重要的执行器件,在多个学科中发挥着重要作用。根据微泵的驱动方式,综述了近年国内外出现的各种机械式和非机械式微泵的原理和相应的性能,并简要总结了微泵选型需要注意的主要指标,对其应用前景进行了展望。
Micropump plays a very important role in micro electromechanieal systems, promising fine perspective in multi applications. The research on the micropump in the past few years is reviewed. Based on the styles of micropump drivers, the mechanical and non-mechanical mieropump are summarized from the aspects of their principles and performances. The indexes have to be paid attention to during the selection of the micropump are introduced, and the application of the micropump in many fields is also diseussed.[Chinese Medical Equipment Journal, 2010,31 （2）：46-49]
出处
《医疗卫生装备》
CAS
2010年第2期46-49,共4页
Chinese Medical Equipment Journal
