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衍射光学元件设计参数对束匀滑衍射效率的影响 被引量:1

Influence of design parameters of diffractive optical elements on diffraction efficiency in beam smoothing
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摘要 经过理论推导,分析了320 mm口径衍射光学元件在束匀滑实验中光强分布出现高级次衍射斑和元件实际衍射效率变低的原因,模拟计算得到了接近实验的光强分布。模拟分析发现:通过调整设计参数,如适当增加抽样点数,使设计时焦斑主瓣占输出计算窗口的比例减小至0.2以下,可以大大降低由于高级次衍射斑造成的衍射效率损失,控制在2%以内,使台阶分布式相位片实际衍射效率得到提高,在对口径为70及320 mm的台阶分布式相位片样品测试中得到了验证。 The reason is theoretically discussed for the existence of sub-diffractive spots around the focal spot and the decrease of diffraction efficiency in beam smoothing by 320 ram-diameter diffractive optical elements. Through the simulation analysis, it is suggested that, by means of adjusting the design parameters, the intensity of sub-diffractive spots can be Suppressed ef- fectively, which can ensure the effect of diffractive optical elements in beam smoothing. For example, by appropriately increasing sampling points, the proportion of focal spot to whole output range, named Yita, can be decreased, and the efficiency loss engendered by sub-diffractive spots would be restricted. When Yita is less than 0.2, the efficiency loss can be controlled within 2%. The experimental results with 70mm- and 320 mm-diameter distributed phase plates have validated the simulation results.
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2010年第2期369-373,共5页 High Power Laser and Particle Beams
基金 国家高技术发展计划项目
关键词 衍射光学元件 束匀滑 衍射效率 台阶分布式相位片 diffractive optical elements beam smoothing diffraction efficiency distributed phase plate
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  • 1王多书,罗崇泰,陈焘,刘宏开,马勉军,黄良甫.极坐标激光直写技术制作微结构[J].激光与红外,2006,36(7):525-528. 被引量:1
  • 2Josip Vukusic, Jrgen Bengtsson, Marco Ghisoni et al.. Fabrication and characterization of diffractive optical elements in InP for monolithic integration with surface-emitting components [J]. Appl. Opt., 2000, 39(3): 398-401.
  • 3Yutaka Kuroiwa, Nobuhito Takeshima, Yoshihiro Narita et al.. Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements [J]. Opt. Express, 2004, 12(9) : 1908-1915.
  • 4Mikael Karlsson, F. Nikolajeff. Fabrication and evaluation of a diamond diffractive fan-out element for high power lasers[J]. Opt. Express, 2003, 11(3): 191--198.
  • 5X. G. Deng, Y. P. Li, D. Y. Fanet al.. Pure-phase plates for super Gaussian focal-plane irradiance profile generations of extremely high order[J]. Opt. Lett., 1996, 21(24) : 1963-1965.
  • 6C. Sun, C. Liu. Ultrasmall focusing spot with a long depth of focus based on polarization and phase modulation[J]. Opt. Lett. , 2003, 28(2): 99-101.
  • 7Fu Yongqi, Ngoi Kok Ann Bryan, Ong Shing. Diffractive optical elements with continuous relief fabricated by focused ion beam for monomode fiber coupling [ J ]. Opt. Express, 2000, 7 ( 3 ) : 141-148.
  • 8J. R. Fienup. Iterative method applied to image reconstruction and to computer generated holograms[J-. Opt. Eng., 1980, 19(3) : 297--305.
  • 9刘强,张晓波,邬融,田杨超,李永平.离子束刻蚀工艺误差对DOE器件的影响[J].光电工程,2007,34(11):50-54. 被引量:4
  • 10孟祥峰,李立峰.提高离子束刻蚀亚微米光栅侧壁陡直度的方法[J].光学学报,2008,28(1):189-193. 被引量:9

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