摘要
提出用红外干涉仪在长波工作(λ=10.6μm)的优点检测非球面面形。首先,通过移相算法,使用泰曼型红外干涉仪测量出非球面与标准拟合球面之间的波像差;然后,根据非球面的矢高方程计算出非球面与标准拟合球面之间波像差的理论值,通过比较这两个值,计算出非球面的面形偏差。实验结果表明,使用红外干涉仪测量的非球面与标准拟合球面之间的波像差为8.64μm(PV),与理论波像差(8.11μm)比较接近,测得非球面面形偏差为1.20μm(PV)。为了验证这一方法的准确性,使用计算全息图(CGH)作为补偿镜在可见光干涉仪上测量了同一块非球面,两者测量结果比较吻合。结果表明,此方法有比较强的通用性,可以用于非球面在加工过程中的测试。
The aspheric surfaces are measured by an infrared interferometer with a long working wavelength（λ=10.6 μm）.By using the phase-shifting infrared interferometer,the wavefront aberration between aspheric wavefront and reference spherical wavefront is measured.Then,the theoretical value of the wavefront aberration is computed based on the aspheric surface equation.Finally,the surface deviation of tested asphere is obtained by subtraction of the theoretical wavefront aberration from the measured one.Experimental results show that the measured wavefront aberration is 8.64 μm（PV）,which is close to the theoretical wavefront aberration（8.11 μm）.Furthermore,the aspheric surface deviation is 1.20 μm（PV）.In order to verify the accuracy of this method,the same asphere is measured by using a Computer Generated Hologram（CGH）method,and the results show that the two methods are coincident well.It is concluded that the method has advantages of easy operation and good flexibility,and can meet the measurement requirement of the aspheric surface manufacture.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第1期69-74,共6页
Optics and Precision Engineering
基金
国家教育部博士点基金资助项目(No.20070288010)
兵器预研支撑基金项目(No.62301110116)
关键词
光学测量
非球面
红外干涉仪
波像差
optical measurement
aspheric surface
infrared interferometer
wavefront aberration
