摘要
针对目前压电驱动器主要使用非对称锯齿波电信号驱动压电晶体实现驱动的现状,采用对称电压信号驱动压电振子,设计了非对称夹持式压电旋转驱动器。用对称波电信号作用在压电双晶片振子上,产生正反两个方向大小不同的周期性惯性冲击力,驱动机构实现旋转位移。建立了压电旋转驱动器的动力学模型,分析了非对称夹持旋转驱动器实现大小不同惯性冲击力的原理以及压电旋转驱动器的运动过程。组成了压电旋转驱动器的测试系统,在不同电压幅值、频率的方波激励下,对压电旋转驱动器的平均步长进行了测试。结果表明:非对称夹持式压电旋转驱动器能实现较稳定的单向转动,最大行程为360°,最大承载能力超过300g,步长分辨率为5μrad,最大转动速度为4000μrad/s;驱动器样机在20V、2Hz的方波激励下,平均运动步长为12μrad,转动速度为24μrad/s。
The asymmetrical rotated piezoelectric actuator is mainly driven by a sawtooth wave,namely,a kind of asymmetrical wave.On the basis of the ability of symmetrical wave drive and the principle of the converse piezoelectric effect,a design scheme using symmetrical wave to drive the piezoelectric cantilever bimorphs is proposed.The symmetrical wave is acted on the piezoelectric cantilever bimorphs to get inertial impact forces in different directions to drive the rotated actuator to realize the movement.The dynamic model of the rotated actuator is constructed,whose movement principle is also analyzed.An experimental system is built and the rotated actuator＇s velocity characteristics under different frequencies and voltages are tested.The results show that the asymmetrical rotated piezoelectric actuator realizes a stable and forward direction movement.When the voltage is 20 V and the frequency is 2 Hz square wave,its average step is up to 12 μrad and the rotation velocity is up to 24 μrad/s.The rotated actuator can provide the maximum stroke in 360°,carrying capacity to 300 g,resolving capability in 5 μrad,and rotation velocity in 4 000 μrad/s.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第1期156-161,共6页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.5073500250605027)
国家863高技术研究发展计划资助项目(No.2007AA04Z336)
关键词
非对称波
惯性冲击
压电双晶片
旋转驱动器
asymmetric wave
inertial impact
piezoelectric cantilever bimorph
rotated actuator
